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Journal Articles Sensors and Actuators A: Physical Year : 2004

Polycrystalline AlN films deposited at low temperature for selective UV detectors

José Alvarez
V. Afanasjev
  • Function : Author
V.V. Luchinin
  • Function : Author
A.P. Sazanov
  • Function : Author
E.I. Terukov
  • Function : Author
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Dates and versions

hal-00321026 , version 1 (12-09-2008)

Identifiers

  • HAL Id : hal-00321026 , version 1

Cite

José Alvarez, Alexander Gudovskikh, Jean-Paul Kleider, V. Afanasjev, V.V. Luchinin, et al.. Polycrystalline AlN films deposited at low temperature for selective UV detectors. Sensors and Actuators A: Physical , 2004, 113, pp.355-359. ⟨hal-00321026⟩
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