Journal Articles
Sensors and Actuators A: Physical
Year : 2004
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https://centralesupelec.hal.science/hal-00321026
Submitted on : Friday, September 12, 2008-10:15:28 AM
Last modification on : Friday, March 24, 2023-2:52:50 PM
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- HAL Id : hal-00321026 , version 1
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José Alvarez, Alexander Gudovskikh, Jean-Paul Kleider, V. Afanasjev, V.V. Luchinin, et al.. Polycrystalline AlN films deposited at low temperature for selective UV detectors. Sensors and Actuators A: Physical , 2004, 113, pp.355-359. ⟨hal-00321026⟩
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