Influence of the amorphous/crystalline silicon heterostructure properties on planar conductance measurements - CentraleSupélec
Article Dans Une Revue Journal of Non-Crystalline Solids Année : 2012

Influence of the amorphous/crystalline silicon heterostructure properties on planar conductance measurements

Résumé

We report a quasi-analytical calculation describing the heterojunction between hydrogenated amorphous silicon (a-Si:H) and crystalline silicon (c-Si) at equilibrium. It has been developed and used to determine the carrier sheet density in the strongly inverted layer at the a-Si:H/ c-Si interface. The model assumes an exponential band tail for the defect distribution in a-Si:H. The effects of the different parameters involved in the calculation are investigated in detail, such as the Fermi level position in a-Si:H, the density of states and the band offsets. The calculation was used to interpret temperature dependent planar conductance measurements carried out on (n) a-Si:H/ (p) c-Si and (p) a-Si:H/(n) c-Si structures, which allowed us to confirm a previous evaluation of the conduction band offset, ∆EC = 0.18 ± 0.05 eV, and to evaluate the valence band offset: ∆EV = 0.36 ± 0.05 eV at the a-Si:H/ c-Si heterojunction. The results are placed in the frame of recent publications.

Dates et versions

hal-00778951 , version 1 (21-01-2013)

Identifiants

Citer

Renaud Varache, Wilfried Favre, Lars Korte, Jean-Paul Kleider. Influence of the amorphous/crystalline silicon heterostructure properties on planar conductance measurements. Journal of Non-Crystalline Solids, 2012, 358 (17), pp.2236-2240. ⟨10.1016/j.jnoncrysol.2011.11.023⟩. ⟨hal-00778951⟩
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