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Conference Papers Year : 2013

Influence of excitation waveform and oscillator geometry on the resonant pull-in of capacitive MEMS oscillators

Abstract

The purpose of this paper is to provide a simple framework for determining the resonant pull-in of MEMS oscillators, either parallel-plate, CC-beam or cantilever, under one- sided and two-sided sinusoidal, square-wave or pulse- actuation. Furthermore, the values of the resonant and static pull-in amplitudes are calculated and tabulated, in all the considered cases.
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Dates and versions

hal-00830533 , version 1 (05-06-2013)

Identifiers

  • HAL Id : hal-00830533 , version 1

Cite

Jérome Juillard, Grégory Arndt, Julien Arcamone, Eric Colinet. Influence of excitation waveform and oscillator geometry on the resonant pull-in of capacitive MEMS oscillators. DTIP 2013, Apr 2013, Barcelona, Spain. pp.2-5. ⟨hal-00830533⟩
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