<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-01363690</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-19T03:29:25+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Atomic layer deposition of gallium phosphide for silicon based photovoltaics</title>
            <author role="aut">
              <persName>
                <forename type="first">A.S.</forename>
                <surname>Gudovskikh</surname>
              </persName>
              <idno type="halauthorid">135300-0</idno>
              <affiliation ref="#struct-253077"/>
              <affiliation ref="#struct-90038"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">I.A.</forename>
                <surname>Morozov</surname>
              </persName>
              <idno type="halauthorid">1057545-0</idno>
              <affiliation ref="#struct-253077"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">D. A.</forename>
                <surname>Kudryashov</surname>
              </persName>
              <idno type="halauthorid">1057546-0</idno>
              <affiliation ref="#struct-253077"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">E.V.</forename>
                <surname>Nikitina</surname>
              </persName>
              <idno type="halauthorid">879177-0</idno>
              <affiliation ref="#struct-253077"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">A. S.</forename>
                <surname>Bukatin</surname>
              </persName>
              <idno type="halauthorid">1057547-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Jean-Paul</forename>
                <surname>Kleider</surname>
              </persName>
              <email type="md5">02f2ee05783015520771f3f60502ea79</email>
              <email type="domain">centralesupelec.fr</email>
              <idno type="idhal" notation="string">jean-paul-kleider</idno>
              <idno type="idhal" notation="numeric">5984</idno>
              <idno type="halauthorid" notation="string">7332-5984</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-4388-6326</idno>
              <idno type="IDREF">https://www.idref.fr/03273039X</idno>
              <affiliation ref="#struct-411302"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Jean-Paul</forename>
                <surname>KLEIDER</surname>
              </persName>
              <email type="md5">02f2ee05783015520771f3f60502ea79</email>
              <email type="domain">centralesupelec.fr</email>
            </editor>
            <funder ref="#projanr-37202"/>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2016-09-11 10:23:43</date>
              <date type="whenModified">2023-03-24 14:53:02</date>
              <date type="whenReleased">2016-09-11 10:23:43</date>
              <date type="whenProduced">2016-05-09</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="326209">
                <persName>
                  <forename>Jean-Paul</forename>
                  <surname>KLEIDER</surname>
                </persName>
                <email type="md5">02f2ee05783015520771f3f60502ea79</email>
                <email type="domain">centralesupelec.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-01363690</idno>
            <idno type="halUri">https://centralesupelec.hal.science/hal-01363690</idno>
            <idno type="halBibtex">gudovskikh:hal-01363690</idno>
            <idno type="halRefHtml">&lt;i&gt;Photovoltaic Technical Conference, PVTC 2016&lt;/i&gt;, May 2016, Marseille, France</idno>
            <idno type="halRef">Photovoltaic Technical Conference, PVTC 2016, May 2016, Marseille, France</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UPMC" corresp="SORBONNE-UNIVERSITE">Université Pierre et Marie Curie</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-PSUD">Université Paris Sud - Paris XI</idno>
            <idno type="stamp" n="CENTRALESUPELEC">Ecole CentraleSupélec</idno>
            <idno type="stamp" n="GEEPS" corresp="SORBONNE-UNIVERSITE">Laboratoire Génie électrique et électronique de Paris</idno>
            <idno type="stamp" n="PHEMADIC" corresp="GEEPS">Pôle Matériaux</idno>
            <idno type="stamp" n="UNIV-PARIS-SACLAY">Université Paris-Saclay</idno>
            <idno type="stamp" n="UNIV-PSUD-SACLAY" corresp="UNIV-PARIS-SACLAY">Université Paris Sud pour Paris Saclay</idno>
            <idno type="stamp" n="CENTRALESUPELEC-SACLAY" corresp="UNIV-PARIS-SACLAY">CENTRALESUPELEC-SACLAY</idno>
            <idno type="stamp" n="UPMC_POLE_1" corresp="UPMC">UPMC Pôle 1</idno>
            <idno type="stamp" n="SORBONNE-UNIVERSITE">Sorbonne Université</idno>
            <idno type="stamp" n="SU-SCIENCES" corresp="SORBONNE-UNIVERSITE">Faculté des Sciences de Sorbonne Université</idno>
            <idno type="stamp" n="ANR">ANR</idno>
            <idno type="stamp" n="GS-ENGINEERING">Graduate School Sciences de l'Ingénierie et des Systèmes</idno>
            <idno type="stamp" n="GS-PHYSIQUE">Graduate School Physique</idno>
            <idno type="stamp" n="INSTITUT-SCIENCES-LUMIERE">Institut des Sciences de la Lumière</idno>
            <idno type="stamp" n="ALLIANCE-SU"> Alliance Sorbonne Université</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
            <note type="proceedings" n="0">No</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Atomic layer deposition of gallium phosphide for silicon based photovoltaics</title>
                <author role="aut">
                  <persName>
                    <forename type="first">A.S.</forename>
                    <surname>Gudovskikh</surname>
                  </persName>
                  <idno type="halauthorid">135300-0</idno>
                  <affiliation ref="#struct-253077"/>
                  <affiliation ref="#struct-90038"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">I.A.</forename>
                    <surname>Morozov</surname>
                  </persName>
                  <idno type="halauthorid">1057545-0</idno>
                  <affiliation ref="#struct-253077"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">D. A.</forename>
                    <surname>Kudryashov</surname>
                  </persName>
                  <idno type="halauthorid">1057546-0</idno>
                  <affiliation ref="#struct-253077"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">E.V.</forename>
                    <surname>Nikitina</surname>
                  </persName>
                  <idno type="halauthorid">879177-0</idno>
                  <affiliation ref="#struct-253077"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">A. S.</forename>
                    <surname>Bukatin</surname>
                  </persName>
                  <idno type="halauthorid">1057547-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Jean-Paul</forename>
                    <surname>Kleider</surname>
                  </persName>
                  <email type="md5">02f2ee05783015520771f3f60502ea79</email>
                  <email type="domain">centralesupelec.fr</email>
                  <idno type="idhal" notation="string">jean-paul-kleider</idno>
                  <idno type="idhal" notation="numeric">5984</idno>
                  <idno type="halauthorid" notation="string">7332-5984</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-4388-6326</idno>
                  <idno type="IDREF">https://www.idref.fr/03273039X</idno>
                  <affiliation ref="#struct-411302"/>
                </author>
              </analytic>
              <monogr>
                <meeting>
                  <title>Photovoltaic Technical Conference, PVTC 2016</title>
                  <date type="start">2016-05-09</date>
                  <date type="end">2016-05-11</date>
                  <settlement>Marseille</settlement>
                  <country key="FR">France</country>
                </meeting>
                <imprint/>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="phys.cond.cm-ms">Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]</classCode>
              <classCode scheme="halDomain" n="spi.nano">Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics</classCode>
              <classCode scheme="halDomain" n="spi.nrj">Engineering Sciences [physics]/Electric power</classCode>
              <classCode scheme="halDomain" n="spi.opti">Engineering Sciences [physics]/Optics / Photonic</classCode>
              <classCode scheme="halDomain" n="spi.mat">Engineering Sciences [physics]/Materials</classCode>
              <classCode scheme="halTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halOldTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halTreeTypology" n="COMM">Conference papers</classCode>
            </textClass>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-253077" status="INCOMING">
          <orgName>Saint Petersburg Academic University</orgName>
          <desc>
            <address>
              <country key="RU"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-360468" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-90038" status="INCOMING">
          <orgName>Saint Petersburg Electrotechnical University</orgName>
          <orgName type="acronym">LETI</orgName>
          <desc>
            <address>
              <addrLine>Professor Popov str. 5, St.Petersburg, 197376, RUSSIA</addrLine>
              <country key="RU"/>
            </address>
            <ref type="url">http://www.eltech.ru/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-322411" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-411302" status="OLD">
          <idno type="IdRef">152859241</idno>
          <idno type="RNSR">199812843Y</idno>
          <orgName>Laboratoire Génie électrique et électronique de Paris</orgName>
          <orgName type="acronym">GeePs</orgName>
          <date type="start">2015-01-01</date>
          <date type="end">2018-12-31</date>
          <desc>
            <address>
              <addrLine>11, rue Joliot CuriePlateau de Moulon91192 Gif sur Yvette</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://geeps.lgep.supelec.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-92966" type="direct"/>
            <relation active="#struct-93591" type="direct"/>
            <relation active="#struct-411575" type="direct"/>
            <relation name="UMR8507" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-360468" status="INCOMING">
          <orgName>Saint Petersburg Academic University</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-322411" status="INCOMING">
          <orgName>Saint Petersburg Electrotechnical University</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-92966" status="OLD">
          <idno type="ROR">https://ror.org/028rypz17</idno>
          <orgName>Université Paris-Sud - Paris 11</orgName>
          <orgName type="acronym">UP11</orgName>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>Bâtiment 300 - 91405 Orsay cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.u-psud.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-93591" status="OLD">
          <idno type="ROR">https://ror.org/02en5vm52</idno>
          <orgName>Université Pierre et Marie Curie - Paris 6</orgName>
          <orgName type="acronym">UPMC</orgName>
          <date type="end">2017-12-31</date>
          <desc>
            <address>
              <addrLine>4 place Jussieu - 75005 Paris</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.upmc.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-411575" status="VALID">
          <idno type="IdRef">184443237</idno>
          <idno type="ROR">https://ror.org/019tcpt25</idno>
          <orgName>CentraleSupélec</orgName>
          <desc>
            <address>
              <addrLine>3, rue Joliot Curie,Plateau de Moulon,91192 GIF-SUR-YVETTE Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.centralesupelec.fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
      </listOrg>
      <listOrg type="projects">
        <org type="anrProject" xml:id="projanr-37202" status="VALID">
          <idno type="anr">ANR-13-PRGE-0009</idno>
          <idno type="program">Production Renouvelable et Gestion de l'Electricité</idno>
          <orgName>IMPETUS</orgName>
          <desc>Multi-jonctions innovantes combinant MOVPE et épitaxie à basse température pour le solaire</desc>
          <date type="start">2013</date>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>