%0 Journal Article %T KPFM surface photovoltage measurement and numerical simulation %+ Institut Photovoltaïque d’Ile-de-France (UMR) (IPVF) %+ Laboratoire Génie électrique et électronique de Paris (GeePs) %+ International Solar Energy Research Center (ISE Konstanz e.V.) %+ EDF R&D (EDF R&D) %A Marchat, Clément %A Connolly, James, P %A Kleider, Jean-Paul %A Alvarez, José %A Koduvelikulathu, Lejo %A Puel, Jean Baptiste %< avec comité de lecture %@ 2105-0716 %J EPJ Photovoltaics %I EDP sciences %V 10 %P 3 %8 2019 %D 2019 %R 10.1051/epjpv/2019002 %Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] %Z Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics %Z Engineering Sciences [physics]/Electric power %Z Engineering Sciences [physics]/Optics / Photonic %Z Engineering Sciences [physics]/MaterialsJournal articles %X A method for the analysis of Kelvin probe force microscopy (KPFM) characterization of semiconductor devices is presented. It enables evaluation of the influence of defective surface layers. The model is validated by analysing experimental KPFM measurements on crystalline silicon samples of contact potential difference (V CPD) in the dark and under illumination, and hence the surface photovoltage (SPV). It is shown that the model phenomenologically explains the observed KPFM measurements. It reproduces the magnitude of SPV characterization as a function of incident light power in terms of a defect density assuming Gaussian defect distribution in the semiconductor bandgap. This allows an estimation of defect densities in surface layers of semiconductors and therefore increased exploitation of KPFM data. %G English %2 https://centralesupelec.hal.science/hal-02308439/document %2 https://centralesupelec.hal.science/hal-02308439/file/pv180014.pdf %L hal-02308439 %U https://centralesupelec.hal.science/hal-02308439 %~ X %~ ENSCP %~ CNRS %~ UNIV-PSUD %~ ENSC-PARIS %~ X-DEP %~ PARISTECH %~ CENTRALESUPELEC %~ GEEPS %~ PHEMADIC %~ INC-CNRS %~ PSL %~ UNIV-PARIS-SACLAY %~ UNIV-PSUD-SACLAY %~ CENTRALESUPELEC-SACLAY %~ X-SACLAY %~ EDF %~ SORBONNE-UNIVERSITE %~ SORBONNE-UNIV %~ SU-SCIENCES %~ IPVF %~ TEST-HALCNRS %~ ENSCP-PSL %~ SU-TI %~ GS-ENGINEERING %~ GS-PHYSIQUE %~ INSTITUT-SCIENCES-LUMIERE %~ ALLIANCE-SU %~ TEST2-HALCNRS