%0 Conference Paper %F Poster %T Low Temperature p-n Junction Fabrication by PECVD for n-PERT Solar Cells: An Alternative to Boron Diffusion %+ Laboratoire de physique des interfaces et des couches minces [Palaiseau] (LPICM) %+ Total M&S [Paris La Defense] %+ Institut Photovoltaïque d’Ile-de-France (UMR) (IPVF) %+ Laboratoire Génie électrique et électronique de Paris (GeePs) %A Chrostowski, Marta %A Alvarez, J %A Kleider, Jean-Paul %A Kim, K.-H. %A Drahi, Etienne %A Roca I Cabarrocas, Pere Roca I Cabarrocas %< avec comité de lecture %B 36th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC 2019) %C Marseille, France %8 2019-09-09 %D 2019 %Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] %Z Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics %Z Engineering Sciences [physics]/Electric power %Z Engineering Sciences [physics]/Optics / Photonic %Z Engineering Sciences [physics]/MaterialsConference poster %G English %L hal-02344037 %U https://centralesupelec.hal.science/hal-02344037 %~ X %~ ENSCP %~ CNRS %~ UNIV-PSUD %~ ENSC-PARIS %~ X-PICM %~ X-DEP %~ X-DEP-PHYS %~ PARISTECH %~ LPICM %~ CENTRALESUPELEC %~ GEEPS %~ PHEMADIC %~ INC-CNRS %~ PSL %~ UNIV-PARIS-SACLAY %~ UNIV-PSUD-SACLAY %~ CENTRALESUPELEC-SACLAY %~ EDF %~ SORBONNE-UNIVERSITE %~ SORBONNE-UNIV %~ SU-SCIENCES %~ IP_PARIS %~ IPVF %~ IP_PARIS_COPIE %~ TEST-HALCNRS %~ ENSCP-PSL %~ GS-ENGINEERING %~ GS-PHYSIQUE %~ INSTITUT-SCIENCES-LUMIERE %~ ALLIANCE-SU %~ TEST2-HALCNRS