<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-04462947</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-02T08:15:56+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Effect of the Al2O3 Deposition Method on Parylene C: Highlights on a Nanopillar-Shaped Surface</title>
            <author role="aut">
              <persName>
                <forename type="first">Joanna</forename>
                <surname>Njeim</surname>
              </persName>
              <idno type="halauthorid">1037450-0</idno>
              <affiliation ref="#struct-1051121"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">David</forename>
                <surname>Alamarguy</surname>
              </persName>
              <email type="md5">adc5076957117cde5fa97e77a4dbd6dd</email>
              <email type="domain">supelec.fr</email>
              <idno type="idhal" notation="string">david-alamarguy</idno>
              <idno type="idhal" notation="numeric">6437</idno>
              <idno type="halauthorid" notation="string">3031-6437</idno>
              <idno type="IDREF">https://www.idref.fr/081093373</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-7617-3029</idno>
              <affiliation ref="#struct-1051121"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Xiaolong</forename>
                <surname>Tu</surname>
              </persName>
              <idno type="halauthorid">1006561-0</idno>
              <affiliation ref="#struct-240928"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Alan</forename>
                <surname>Durnez</surname>
              </persName>
              <idno type="halauthorid">2088350-0</idno>
              <affiliation ref="#struct-1041855"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Xavier</forename>
                <surname>Lafosse</surname>
              </persName>
              <idno type="halauthorid">351475-0</idno>
              <affiliation ref="#struct-1041855"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Pascal</forename>
                <surname>Chrétien</surname>
              </persName>
              <email type="md5">fb5b795cb012ff86091c21403a6ddb33</email>
              <email type="domain">centralesupelec.fr</email>
              <idno type="idhal" notation="string">pascal-chretien</idno>
              <idno type="idhal" notation="numeric">5981</idno>
              <idno type="halauthorid" notation="string">3029-5981</idno>
              <idno type="ORCID">https://orcid.org/0009-0005-5177-1360</idno>
              <affiliation ref="#struct-1051121"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Ali</forename>
                <surname>Madouri</surname>
              </persName>
              <idno type="halauthorid">132632-0</idno>
              <affiliation ref="#struct-1041855"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Zhuoxiang</forename>
                <surname>Ren</surname>
              </persName>
              <email type="md5">31c83d137cfaadd80b23710b44765420</email>
              <email type="domain">upmc.fr</email>
              <idno type="idhal" notation="string">417917</idno>
              <idno type="idhal" notation="numeric">977337</idno>
              <idno type="halauthorid" notation="string">1002326-977337</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-4700-8969</idno>
              <idno type="IDREF">https://www.idref.fr/079712193</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/DNX-7374-2022</idno>
              <idno type="VIAF">https://viaf.org/viaf/213099127</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/DNX-7374-2022</idno>
              <affiliation ref="#struct-1051121"/>
            </author>
            <author role="crp">
              <persName>
                <forename type="first">David</forename>
                <surname>Brunel</surname>
              </persName>
              <email type="md5">0a7cf3dc90093d496cebef8516ac151a</email>
              <email type="domain">sorbonne-universite.fr</email>
              <idno type="idhal" notation="numeric">866970</idno>
              <idno type="halauthorid" notation="string">441281-866970</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-6722-7862</idno>
              <idno type="IDREF">https://www.idref.fr/137197497</idno>
              <affiliation ref="#struct-1051121"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Ali</forename>
                <surname>MADOURI</surname>
              </persName>
              <email type="md5">8887d515c4e64a567d7c99f42860854f</email>
              <email type="domain">c2n.upsaclay.fr</email>
            </editor>
            <funder ref="#projanr-41698"/>
            <funder>French RENATECH network</funder>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2024-04-05 09:31:08</date>
              <date type="whenModified">2025-12-17 13:26:44</date>
              <date type="whenReleased">2024-04-08 16:31:04</date>
              <date type="whenProduced">2020-06-24</date>
              <date type="whenEndEmbargoed">2024-04-05</date>
              <ref type="file" target="https://centralesupelec.hal.science/hal-04462947v1/document">
                <date notBefore="2024-04-05"/>
              </ref>
              <ref type="file" subtype="publisherPaid" n="1" target="https://centralesupelec.hal.science/hal-04462947v1/file/ao0c00735.pdf" id="file-4533724-3931288">
                <date notBefore="2024-04-05"/>
              </ref>
              <ref type="externalLink" target="https://pubs.acs.org/doi/pdf/10.1021/acsomega.0c00735"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="1092219">
                <persName>
                  <forename>Ali</forename>
                  <surname>MADOURI</surname>
                </persName>
                <email type="md5">8887d515c4e64a567d7c99f42860854f</email>
                <email type="domain">c2n.upsaclay.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-04462947</idno>
            <idno type="halUri">https://centralesupelec.hal.science/hal-04462947</idno>
            <idno type="halBibtex">njeim:hal-04462947</idno>
            <idno type="halRefHtml">&lt;i&gt;ACS Omega&lt;/i&gt;, 2020, 5 (26), pp.15828-15834. &lt;a target="_blank" href="https://dx.doi.org/10.1021/acsomega.0c00735"&gt;&amp;#x27E8;10.1021/acsomega.0c00735&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">ACS Omega, 2020, 5 (26), pp.15828-15834. &amp;#x27E8;10.1021/acsomega.0c00735&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-4533724-3931288"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="ENS-PARIS">Ecole Normale Supérieure de Paris</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="CENTRALESUPELEC">Ecole CentraleSupélec</idno>
            <idno type="stamp" n="GEEPS" corresp="SORBONNE-UNIVERSITE">Laboratoire Génie électrique et électronique de Paris</idno>
            <idno type="stamp" n="PSL">Université Paris sciences et lettres</idno>
            <idno type="stamp" n="UNIV-PARIS-SACLAY">Université Paris-Saclay</idno>
            <idno type="stamp" n="SORBONNE-UNIVERSITE">Sorbonne Université</idno>
            <idno type="stamp" n="SORBONNE-UNIV" corresp="SORBONNE-UNIVERSITE">Sorbonne Université 01/01/2018</idno>
            <idno type="stamp" n="SU-SCIENCES" corresp="SORBONNE-UNIVERSITE">Faculté des Sciences de Sorbonne Université</idno>
            <idno type="stamp" n="GEEPS-MATERIAU">Equipe Matériaux du GeePs</idno>
            <idno type="stamp" n="ENS-PSL" corresp="PSL">École normale supérieure - PSL</idno>
            <idno type="stamp" n="UNIVERSITE-PARIS-SACLAY" corresp="UNIV-PARIS-SACLAY">Université Paris-Saclay</idno>
            <idno type="stamp" n="SU-TI">Sorbonne Université - Texte Intégral</idno>
            <idno type="stamp" n="ANR">ANR</idno>
            <idno type="stamp" n="GS-PHYSIQUE">Graduate School Physique</idno>
            <idno type="stamp" n="INSTITUT-SCIENCES-LUMIERE">Institut des Sciences de la Lumière</idno>
            <idno type="stamp" n="ALLIANCE-SU"> Alliance Sorbonne Université</idno>
            <idno type="stamp" n="C2N">Centre de Nanosciences et de Nanotechnologies</idno>
            <idno type="stamp" n="RENATECH">RENATECH</idno>
            <idno type="stamp" n="SUPRA_INGENIERIE">Ingénierie</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Effect of the Al2O3 Deposition Method on Parylene C: Highlights on a Nanopillar-Shaped Surface</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Joanna</forename>
                    <surname>Njeim</surname>
                  </persName>
                  <idno type="halauthorid">1037450-0</idno>
                  <affiliation ref="#struct-1051121"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">David</forename>
                    <surname>Alamarguy</surname>
                  </persName>
                  <email type="md5">adc5076957117cde5fa97e77a4dbd6dd</email>
                  <email type="domain">supelec.fr</email>
                  <idno type="idhal" notation="string">david-alamarguy</idno>
                  <idno type="idhal" notation="numeric">6437</idno>
                  <idno type="halauthorid" notation="string">3031-6437</idno>
                  <idno type="IDREF">https://www.idref.fr/081093373</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-7617-3029</idno>
                  <affiliation ref="#struct-1051121"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Xiaolong</forename>
                    <surname>Tu</surname>
                  </persName>
                  <idno type="halauthorid">1006561-0</idno>
                  <affiliation ref="#struct-240928"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Alan</forename>
                    <surname>Durnez</surname>
                  </persName>
                  <idno type="halauthorid">2088350-0</idno>
                  <affiliation ref="#struct-1041855"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Xavier</forename>
                    <surname>Lafosse</surname>
                  </persName>
                  <idno type="halauthorid">351475-0</idno>
                  <affiliation ref="#struct-1041855"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Pascal</forename>
                    <surname>Chrétien</surname>
                  </persName>
                  <email type="md5">fb5b795cb012ff86091c21403a6ddb33</email>
                  <email type="domain">centralesupelec.fr</email>
                  <idno type="idhal" notation="string">pascal-chretien</idno>
                  <idno type="idhal" notation="numeric">5981</idno>
                  <idno type="halauthorid" notation="string">3029-5981</idno>
                  <idno type="ORCID">https://orcid.org/0009-0005-5177-1360</idno>
                  <affiliation ref="#struct-1051121"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Ali</forename>
                    <surname>Madouri</surname>
                  </persName>
                  <idno type="halauthorid">132632-0</idno>
                  <affiliation ref="#struct-1041855"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Zhuoxiang</forename>
                    <surname>Ren</surname>
                  </persName>
                  <email type="md5">31c83d137cfaadd80b23710b44765420</email>
                  <email type="domain">upmc.fr</email>
                  <idno type="idhal" notation="string">417917</idno>
                  <idno type="idhal" notation="numeric">977337</idno>
                  <idno type="halauthorid" notation="string">1002326-977337</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-4700-8969</idno>
                  <idno type="IDREF">https://www.idref.fr/079712193</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/DNX-7374-2022</idno>
                  <idno type="VIAF">https://viaf.org/viaf/213099127</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/DNX-7374-2022</idno>
                  <affiliation ref="#struct-1051121"/>
                </author>
                <author role="crp">
                  <persName>
                    <forename type="first">David</forename>
                    <surname>Brunel</surname>
                  </persName>
                  <email type="md5">0a7cf3dc90093d496cebef8516ac151a</email>
                  <email type="domain">sorbonne-universite.fr</email>
                  <idno type="idhal" notation="numeric">866970</idno>
                  <idno type="halauthorid" notation="string">441281-866970</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-6722-7862</idno>
                  <idno type="IDREF">https://www.idref.fr/137197497</idno>
                  <affiliation ref="#struct-1051121"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">109857</idno>
                <idno type="issn">2470-1343</idno>
                <title level="j">ACS Omega</title>
                <imprint>
                  <publisher>ACS Publications</publisher>
                  <biblScope unit="volume">5</biblScope>
                  <biblScope unit="issue">26</biblScope>
                  <biblScope unit="pp">15828-15834</biblScope>
                  <date type="datePub">2020-06-24</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1021/acsomega.0c00735</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">X-ray photoelectron spectroscopy</term>
                <term xml:lang="en">Thickness</term>
                <term xml:lang="en">Oxides</term>
                <term xml:lang="en">Deposition</term>
                <term xml:lang="en">Atomic layer deposition</term>
              </keywords>
              <classCode scheme="halDomain" n="spi">Engineering Sciences [physics]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Parylene C (PC) has attracted tremendous attention throughout the past few years due to its extraordinary properties such as high mechanical strength and biocompatibility. When used as a flexible substrate and combined with high-κ dielectrics such as aluminum oxide (Al2O3), the Al2O3/PC stack becomes very compelling for various applications in fields such as biomedical microsystems and microelectronics. For the latter, the atomic layer deposition of oxides is particularly needed as it allows the deposition of high-quality and nanometer-scale oxide thicknesses. In this work, atomic layer deposition (ALD) and electron beam physical vapor deposition (EBPVD) of Al2O3 on a 15 μm-thick PC layer are realized and their effects on the Al2O3/PC resulting stack are investigated via X-ray photoelectron spectroscopy combined with atomic force microscopy. An ALD-based Al2O3/PC stack is found to result in a nanopillar-shaped surface, while an EBPVD-based Al2O3/PC stack yields an expected smooth surface. In both cases, the Al2O3/PC stack can be easily peeled off from the reusable SiO2 substrate, resulting in a flexible Al2O3/PC film. These fabrication processes are economic, high yielding, and suitable for mass production. Although ALD is particularly appreciated in the semiconducting industry, EBPVD is here found to be better for the realization of the Al2O3/PC flexible substrate for micro- and nanoelectronics.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-1051121" status="VALID">
          <idno type="IdRef">152859241</idno>
          <idno type="RNSR">199812843Y</idno>
          <idno type="ROR">02xnnng09</idno>
          <orgName>Laboratoire Génie électrique et électronique de Paris</orgName>
          <orgName type="acronym">GeePs</orgName>
          <date type="start">2020-01-01</date>
          <desc>
            <address>
              <addrLine>11, rue Joliot CuriePlateau de Moulon91192 Gif sur Yvette</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://geeps.lgep.supelec.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-411575" type="direct"/>
            <relation active="#struct-413221" type="direct"/>
            <relation active="#struct-419361" type="direct"/>
            <relation name="UMR8507" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="regrouplaboratory" xml:id="struct-240928" status="VALID">
          <idno type="IdRef">198500114</idno>
          <orgName>Département de Chimie - ENS-PSL</orgName>
          <date type="start">1985-01-01</date>
          <desc>
            <address>
              <addrLine>24 rue Lhomond75132 Paris Cedex 05</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.chimie.ens.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-59704" type="direct"/>
            <relation active="#struct-564132" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-1041855" status="VALID">
          <orgName>Centre de Nanosciences et de Nanotechnologies</orgName>
          <orgName type="acronym">C2N</orgName>
          <date type="start">2020-01-01</date>
          <desc>
            <address>
              <addrLine>10 Boulevard Thomas Gobert, 91120, Palaiseau</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.c2n.universite-paris-saclay.fr/fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-419361" type="direct"/>
            <relation name="UMR9001" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-411575" status="VALID">
          <idno type="IdRef">184443237</idno>
          <idno type="ROR">https://ror.org/019tcpt25</idno>
          <orgName>CentraleSupélec</orgName>
          <desc>
            <address>
              <addrLine>3, rue Joliot Curie,Plateau de Moulon,91192 GIF-SUR-YVETTE Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.centralesupelec.fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-413221" status="VALID">
          <idno type="IdRef">221333754</idno>
          <idno type="ROR">https://ror.org/02en5vm52</idno>
          <orgName>Sorbonne Université</orgName>
          <orgName type="acronym">SU</orgName>
          <date type="start">2018-01-01</date>
          <desc>
            <address>
              <addrLine>21 rue de l’École de médecine - 75006 Paris</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.sorbonne-universite.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-419361" status="VALID">
          <idno type="IdRef">241345251</idno>
          <idno type="ROR">https://ror.org/03xjwb503</idno>
          <orgName>Université Paris-Saclay</orgName>
          <desc>
            <address>
              <addrLine>Bâtiment Bréguet, 3 Rue Joliot Curie 2e ét, 91190 Gif-sur-Yvette</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.universite-paris-saclay.fr/fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-59704" status="VALID">
          <idno type="IdRef">031738419</idno>
          <idno type="ISNI">0000000123532622</idno>
          <idno type="ROR">https://ror.org/05a0dhs15</idno>
          <orgName>École normale supérieure - Paris</orgName>
          <orgName type="acronym">ENS-PSL</orgName>
          <date type="start">1985-07-24</date>
          <desc>
            <address>
              <addrLine>45, Rue d'Ulm - 75230 Paris cedex 05</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.ens.psl.eu/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-564132" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-564132" status="VALID">
          <idno type="IdRef">241597595</idno>
          <idno type="ISNI">0000 0004 1784 3645</idno>
          <idno type="ROR">https://ror.org/013cjyk83</idno>
          <orgName>Université Paris Sciences et Lettres</orgName>
          <orgName type="acronym">PSL</orgName>
          <desc>
            <address>
              <addrLine>60 rue Mazarine 75006 Paris</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.psl.eu/</ref>
          </desc>
        </org>
      </listOrg>
      <listOrg type="projects">
        <org type="anrProject" xml:id="projanr-41698" status="VALID">
          <idno type="anr">ANR-10-LABX-0035</idno>
          <orgName>Nano-Saclay</orgName>
          <desc>Paris-Saclay multidisciplinary Nano-Lab</desc>
          <date type="start">2010</date>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>