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Argon metastables in HiPIMS: validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnosticsPlasma Sources Science and Technology, 2015, 24 (4), pp.045011. ⟨10.1088/0963-0252/24/4/045011⟩
Journal articles
hal-01348452v1
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A new angle on the plasma discharge physics in magnetron sputtering42nd EPS Conference on Plasma Physics, Jun 2015, Lisbonne, Portugal
Conference papers
hal-03154819v1
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Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on copperThin Solid Films, 2020, 712, pp.138319. ⟨10.1016/j.tsf.2020.138319⟩
Journal articles
hal-02929173v1
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Are the argon metastables important in high power impulse magnetron sputtering discharges?Physics of Plasmas, 2015, 22 (11), pp.113508. ⟨10.1063/1.4935402⟩
Journal articles
hal-01348451v1
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