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Conference Papers Year : 2004

Simultaneous height, resistance and capacitance cartography of a SRAM test sample by conducting probe AFM

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hal-00320180 , version 1 (10-09-2008)

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  • HAL Id : hal-00320180 , version 1

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Pascal Chrétien, Olivier Schneegans, Frédéric Houzé, René Meyer, Lionel Boyer. Simultaneous height, resistance and capacitance cartography of a SRAM test sample by conducting probe AFM. Seing at the Nanoscale II, 2004, France. ⟨hal-00320180⟩
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