Conference Papers
Year : 2004
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https://centralesupelec.hal.science/hal-00320180
Submitted on : Wednesday, September 10, 2008-2:22:43 PM
Last modification on : Friday, March 24, 2023-2:52:50 PM
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- HAL Id : hal-00320180 , version 1
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Pascal Chrétien, Olivier Schneegans, Frédéric Houzé, René Meyer, Lionel Boyer. Simultaneous height, resistance and capacitance cartography of a SRAM test sample by conducting probe AFM. Seing at the Nanoscale II, 2004, France. ⟨hal-00320180⟩
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