Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films - CentraleSupélec Access content directly
Journal Articles Journal of Applied Physics Year : 2005

Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films

P. Chaudhuri
  • Function : Author
A. Bhaduri
  • Function : Author
S. Vignoli
O. Marty
  • Function : Author
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Dates and versions

hal-00321244 , version 1 (12-09-2008)

Identifiers

  • HAL Id : hal-00321244 , version 1

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P. Chaudhuri, Namita Dutta Gupta, A. Bhaduri, Christophe Longeaud, S. Vignoli, et al.. Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films. Journal of Applied Physics, 2005, 98, pp.44913. ⟨hal-00321244⟩
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