Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density - CentraleSupélec Access content directly
Conference Papers Year : 2005

Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density

A. Bhaduri
  • Function : Author
P. Chaudhuri
  • Function : Author
S. Vignoli
O. Marty
  • Function : Author
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Dates and versions

hal-00321712 , version 1 (15-09-2008)

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  • HAL Id : hal-00321712 , version 1

Cite

Namita Dutta Gupta, Christophe Longeaud, A. Bhaduri, P. Chaudhuri, S. Vignoli, et al.. Effect of evolution of powders on a-Si:H samples in silane-argon plasma at low power density. 13th International Workshop on the Physics of Semiconductor Devices, 2005, India. ⟨hal-00321712⟩
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