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Conference Papers Year : 2007

High diffusion length silicon germanium alloys thin films deposited by pulsed rf PECVD method

P. Chaudhuri
  • Function : Author
A. Bhaduri
  • Function : Author
A. Bandyopadhyay
  • Function : Author
S. Vignoli
P.P. Ray
  • Function : Author
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Dates and versions

hal-00322282 , version 1 (17-09-2008)

Identifiers

  • HAL Id : hal-00322282 , version 1

Cite

P. Chaudhuri, A. Bhaduri, A. Bandyopadhyay, S. Vignoli, P.P. Ray, et al.. High diffusion length silicon germanium alloys thin films deposited by pulsed rf PECVD method. 22nd International Conference on Amorphous and Nanocrystalline Semiconductors, ICANS 22, 2007, United States. ⟨hal-00322282⟩
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