A reduced-order piecewise-linear model of squeeze-film damping for deformable structures including large displacement effects
Résumé
Correct modelling of damping is essential to capture the dynamic behaviour of a MEMS device. Our interest is squeeze-film damping which models the behaviour of a fluid in small gaps between a fixed surface and a structure moving perpendicular to this surface . The lateral dimensions of the surfaces are large compared to the gap and the system is considered isothermal. Squeeze film damping is then governed by the Reynolds equation [1].
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