Robust design of subwavelength grating mirror for mid-infrared VCSEL application
Abstract
We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.
Domains
Optics [physics.optics]
Origin : Files produced by the author(s)
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