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Conference Papers Year : 2011

Low Temperature Transparent ITO-based Contacts for Mid-IR Applications


In this work, thin films of Indium Tin Oxide (ITO)-based materials were tested as potential candidates for mid-IR transparent contacts on Te-doped GaSb and Si-doped InAs semiconductor wafers. Since these contacts are devoted to be inserted in Sb-based devices which are generally MBE-grown at ~450°C, low-temperature fabrication processes were particularly tested with a maximum temperature of annealing of 400°C. 50 nm-thick ITO films were deposited on glass, Te-doped GaSb and Si-doped InAs wafers and resistivity of 8.10-4 Ω.cm combined with ~80% of transmittance at 2 μm and ohmic contacts with a specific resistance of 3.10-4 Ω.cm2 were obtained. Then, in order to improve these properties in the mid-IR, other ITO-based materials were tested: In doped ZnO (IZO) and Zn doped ITO (ITZO). The first results obtained on these materials show that the insertion of 10% of Zn in classical ITO structure results in a degradation of the electrical properties of the layer without a real impact on its optical transmittance near 2 μm. Concerning IZO, a large improvement of the transmittance in the whole visible-mid-IR wavelength range was observed for annealed samples at a temperature as low as 350°C. However, the electrical resistivity appears very sensible to the temperature of annealing.
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Dates and versions

hal-00652277 , version 1 (15-12-2011)



Frédéric Genty, Samuel Margueron, Sidi Ould Saad Hamady, Jean-Claude Petit, Hussein Srour, et al.. Low Temperature Transparent ITO-based Contacts for Mid-IR Applications. 2011 MRS Spring Meeting and Exhibit, Apr 2011, San Francisco, United States. mrss11-1327-g09-02-s08-02 (6 p.), ⟨10.1557/opl.2011.1123⟩. ⟨hal-00652277⟩
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