The deconvolution technique is widely used for probe correction in the near field technique measurement. However, the measurement noise makes the result obtained by this method inefficient and requires the use of a very low noise measurement facility. In this paper, we present a method to improve the probe correction accuracy by an inverse filtering approach that takes into account the statistical characteristics of the measurement noise using the constrained least squares filtering algorithm (CLSF). Computations with EM software data of two different structures illustrate the reliability of the method.