Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR - CentraleSupélec

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Conference Papers Year : 2012

Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR

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1

Sofia Gaiaschi

Function : Author

Laboratoire de génie électrique de Paris

E.V. Johnson

Function : Author
PersonId : 739097
IdHAL : erikvjohnson
ORCID : 0000-0003-0920-2111
IdRef : 253120209

Pavel Bulkin

Function : Author
PersonId : 180547
IdHAL : pavel-bulkin
ORCID : 0000-0001-5591-3470
IdRef : 253127122

P. Chapon

Function : Author

Marie-Estelle Gueunier-Farret

Function : Author
PersonId : 14061
IdHAL : marie-gueunier-farret
ORCID : 0000-0003-1615-498X
IdRef : 166935093

Laboratoire de génie électrique de Paris

Jean-Paul Kleider

Function : Author
PersonId : 5984
IdHAL : jean-paul-kleider
ORCID : 0000-0003-4388-6326
IdRef : 03273039X

Laboratoire de génie électrique de Paris

Olivier Schneegans : Connect in order to contact the contributor

https://centralesupelec.hal.science/hal-00779004

Submitted on : Monday, January 21, 2013-3:57:52 PM

Last modification on : Friday, March 24, 2023-2:52:56 PM

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hal-00779004 , version 1 (21-01-2013)

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HAL Id : hal-00779004 , version 1

Cite

Sofia Gaiaschi, E.V. Johnson, Pavel Bulkin, P. Chapon, Marie-Estelle Gueunier-Farret, et al.. Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR. E-MRS Spring Meeting 2012, May 2012, Strasbourg, France. ⟨hal-00779004⟩

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