Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR - CentraleSupélec Access content directly
Conference Papers Year : 2012

Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR

E.V. Johnson
Pavel Bulkin
P. Chapon
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hal-00779004 , version 1 (21-01-2013)

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  • HAL Id : hal-00779004 , version 1

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Sofia Gaiaschi, E.V. Johnson, Pavel Bulkin, P. Chapon, Marie-Estelle Gueunier-Farret, et al.. Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR. E-MRS Spring Meeting 2012, May 2012, Strasbourg, France. ⟨hal-00779004⟩
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