Heteroepitaxial growth of Silicon on GaAs via low temperature plasma-enhanced chemical vapor deposition - CentraleSupélec Access content directly
Conference Papers Year : 2018

Heteroepitaxial growth of Silicon on GaAs via low temperature plasma-enhanced chemical vapor deposition

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hal-01943466 , version 1 (03-12-2018)

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  • HAL Id : hal-01943466 , version 1

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Guénaëlle Hamon, Nicolas Vaissiere Vaissière, Romain Cariou, Wanghua Chen, J Alvarez, et al.. Heteroepitaxial growth of Silicon on GaAs via low temperature plasma-enhanced chemical vapor deposition. Journées Nationales du PhotoVoltaïque (JNPV) 2018, Dec 2018, Dourdan, France. ⟨hal-01943466⟩
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