Design of a Novel Electrostatic MEMS Resonator with Hybrid Nonlinear Behavior
Résumé
This paper presents an innovative structure of electrostatic MEMS resonators meant to balance a hardening nonlinearity with a softening nonlinearity at resonance. We apply a systematic methodology to design three resonators with the same overall structure but different scaling. The proposed structures pave the way to full-gap exploration of optimal operating points under DC voltages lower than 50V and driving voltages lower than 5V and fulfill the main technological requirements of a known SoG (Silicon on glass) fabrication process.
