Communication Dans Un Congrès Année : 2024

Design of a Novel Electrostatic MEMS Resonator with Hybrid Nonlinear Behavior

Résumé

This paper presents an innovative structure of electrostatic MEMS resonators meant to balance a hardening nonlinearity with a softening nonlinearity at resonance. We apply a systematic methodology to design three resonators with the same overall structure but different scaling. The proposed structures pave the way to full-gap exploration of optimal operating points under DC voltages lower than 50V and driving voltages lower than 5V and fulfill the main technological requirements of a known SoG (Silicon on glass) fabrication process.

Fichier non déposé

Dates et versions

hal-05219857 , version 1 (22-08-2025)

Identifiants

Citer

Alejandro Godinez Perez Medina, Alexis Brenes, Jérôme Juillard. Design of a Novel Electrostatic MEMS Resonator with Hybrid Nonlinear Behavior. 2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Jun 2024, Dresden, Germany. pp.1-5, ⟨10.1109/DTIP62575.2024.10613108⟩. ⟨hal-05219857⟩
78 Consultations
0 Téléchargements

Altmetric

Partager

  • More