Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD - CentraleSupélec Access content directly
Conference Papers Year : 2013

Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD

R. Ruggeri
  • Function : Author
E.V. Johnson
Pavel Bulkin
G. Mannino
  • Function : Author
P. Chapon
  • Function : Author
No file

Dates and versions

hal-00931313 , version 1 (15-01-2014)

Identifiers

  • HAL Id : hal-00931313 , version 1

Cite

Sofia Gaiaschi, R. Ruggeri, E.V. Johnson, Pavel Bulkin, Marie-Estelle Gueunier-Farret, et al.. Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD. E-MRS Spring Meeting 2013, May 2013, Strasbourg, France. ⟨hal-00931313⟩
55 View
0 Download

Share

Gmail Mastodon Facebook X LinkedIn More