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Conference Poster Year : 2014

Conducting probe atomic force microscope as a relevant tool for studying some phenomena in MEMS switches

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hal-01099238 , version 1 (01-01-2015)

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  • HAL Id : hal-01099238 , version 1

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Alexis Peschot, Maxime Vincent, Christophe Poulain, Denis Mariolle, Frédéric Houzé, et al.. Conducting probe atomic force microscope as a relevant tool for studying some phenomena in MEMS switches. GreenBAN 2014, Nov 2014, Paris, France. Proceedings of the International Workshop on Green Solutions for Body Area Networks, pp.63 - 66. ⟨hal-01099238⟩
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