Conference Poster
Year : 2014
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https://centralesupelec.hal.science/hal-01099238
Submitted on : Thursday, January 1, 2015-7:23:14 PM
Last modification on : Friday, March 24, 2023-2:53:00 PM
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- HAL Id : hal-01099238 , version 1
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Alexis Peschot, Maxime Vincent, Christophe Poulain, Denis Mariolle, Frédéric Houzé, et al.. Conducting probe atomic force microscope as a relevant tool for studying some phenomena in MEMS switches. GreenBAN 2014, Nov 2014, Paris, France. Proceedings of the International Workshop on Green Solutions for Body Area Networks, pp.63 - 66. ⟨hal-01099238⟩
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