Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD - CentraleSupélec Access content directly
Conference Papers Year : 2014

Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD

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hal-01099579 , version 1 (04-01-2015)

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  • HAL Id : hal-01099579 , version 1

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Sofia Gaiaschi, Marie-Estelle Gueunier-Farret, Christophe Longeaud, E.V. Johnson, P. Chapon, et al.. Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD. E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France. ⟨hal-01099579⟩
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