Enhancing the frequency stability of a NEMS oscillator with electrostatic and mechanical nonlinearities - CentraleSupélec Access content directly
Conference Papers Year : 2009

Enhancing the frequency stability of a NEMS oscillator with electrostatic and mechanical nonlinearities

Abstract

We show how to achieve large-amplitude oscillation and good frequency stability in a nonlinear NEMS oscillator by using a softening nonlinearity to locally balance the hardening behaviour of the Duffing nonlinearity for a given motion amplitude. The case when the softening behaviour is obtained via electrostatic biasing is theoretically investigated, under parallel-plate assumptions, for a fully-capacitive pulse-actuated resonant structure. This is validated by simulated data, in the case of a resonant clamped-clamped beam.
Fichier principal
Vignette du fichier
EurosensorsXIII_2009_v2.pdf (212.71 Ko) Télécharger le fichier
Origin Files produced by the author(s)

Dates and versions

hal-00445428 , version 1 (08-01-2010)

Identifiers

  • HAL Id : hal-00445428 , version 1

Cite

Jérôme Juillard, Grégory Ardnt, Eric Colinet. Enhancing the frequency stability of a NEMS oscillator with electrostatic and mechanical nonlinearities. Eurosensors'09, Procedia Chemistry, Sep 2009, Lausanne, Switzerland. pp.1415-1418. ⟨hal-00445428⟩
158 View
163 Download

Share

Gmail Mastodon Facebook X LinkedIn More